Achieving Equivalent Oxide Thickness Scaling of a ZrO2 Dielectric Thin Film via Gd Doping without Sacrificing Tetragonal Crystallinity
Leakage current control of Y-HfO2 for dynamic random access memory applications via ZrO2 stacking
Introducing a Controlled Interfacial Layer to Enhance the Template Effect of ZrO in the ZrO/HfO/ZrO Structure
Novel halogenated cyclopentadienyl hafnium precursor for atomic layer deposition of high-performance HfO2 thin film
Improvement in dielectric properties of ZrO2 thin film by employing a Zr precursor with enhanced thermal stability in high-temperature atomic layer deposition
Hybrid reactant-enabled atomic layer deposition of HfO 2 for enhancing metal-insulator-metal capacitor fabricated on TiN electrode
Novel deuterated cyclopentadienyl zirconium/hafnium precursors for atomic layer deposition of high-performance ZrO2/HfO2 thin films
In-situ crystallization of rutile-phased TiO2 via the template effect using MoO2 electrode for the metal-insulator-metal capacitor applications
Investigating Dielectric Relaxation Currents for a Deeper Understanding of Capacitance and Interface in Metal-Insulator-Metal Capacitor
Suppressing Interfacial Layer Formation in ZrO2-Based Capacitors with TiN Electrodes via a MgO Thin-Film Oxygen Diffusion Barrier
Optimizing the Crystallinity of a ZrO2 Thin Film Insulator for InGaZnO-Based Metal?Insulator?Semiconductor Capacitors
Self-isolating electrode deposition process using the area-selective MoO2 and MoO3 atomic layer deposition technique
Boosting the Visible Light Optoelectronic Synaptic Characteristics of Solution-Processed IGZO Transistors via Vertically Diffused Cd Dopants
Molybdenum Thin Film Formation from Molybdenum Nitride Deposited by Plasma-enhanced Atomic Layer Deposition with Hydrogen-permeable Mechanical Capping Layer
Controllable Layer-By-Layer CdSe/ZnS Quantum-Dot Thin Films for Enhanced Performance of Light-Emitting Diodes and Photodetectors
Enhancing chemisorption efficiency and thin-film characteristics via a discrete feeding method in high-k dielectric atomic layer deposition for preventing interfacial layer formation
Wake-Up and Endurance Characteristics in Hf0.5Zr0.5O2-Based Metal-Ferroelectric-Metal Capacitor Depending on the Crystal Orientation of the TiN Bottom Electrodes
Reliable high work-function molybdenum dioxide synthesis via template-effect-utilizing atomic layer deposition for next-generation electrode applications
Bottom-up plasma-enhanced atomic layer deposition of SiO2 by utilizing growth inhibition using NH3 plasma pre-treatment for seamless gap-fill process
Controlling the crystallinity of HfO2 thin film using the surface energy-driven phase stabilization and template effect
Achieving High Dielectric Constants in Tetragonal Single-Phase ZrHfO2 Thin Films through the Atomic Layer Deposition Process Using a Mixed Precursor
An Al-doped TiO2 interfacial layer for effective hole injection characteristics of quantum-dot light-emitting diodes
Y-doped HfO2 deposited by atomic layer deposition using a cocktail precursor for DRAM capacitor dielectric application
The Significance on Structural Modulation of Buffer and Gate Insulator for ALD Based InGaZnO TFT Applications
An Empirical Investigation on the Effect of Oxygen Vacancy in ZrO2Thin Film on the Frequency-Dependent Capacitance Degradation in the Metal-Insulator-Metal Capacitor
Plasma-enhanced atomic layer deposited HfO2 films using a novel heteroleptic cyclopentadienyl-based Hf precursor
Sustained complementary resistive switching capability deployed by structure-modulated electric field confinement of core-shell nanowires in a simple polymer composite
Improved Properties of the Atomic Layer Deposited Ru Electrode for Dynamic Random-Access Memory Capacitor Using Discrete Feeding Method
A visible-light phototransistor based on the heterostructure of ZnO and TiO2 with trap-assisted photocurrent generation
Improving the photodetection and stability of a visible-light QDs/ZnO phototransistorviaan Al2O3additional layer
Modulation of the adsorption chemistry of a precursor in atomic layer deposition to enhance the growth per cycle of a TiO2 thin film
Optimized Al-doped TiO2gate insulator for a metal-oxide-semiconductor capacitor on a Ge substrate
Highly sustainable mechanical/electrical resistance switching behaviors via one-dimensional Ag/TiO2 core-shell resistive switchable materials in flexible composite
Chemistry of ruthenium as an electrode for metal-insulator-metal capacitor application